A study of chemical products formed on sapphire (0001)...

Surface and Coatings Technology 2015 / 05 Vol. 270

A study of chemical products formed on sapphire (0001) during chemical–mechanical polishing

Shi, Xiaolei, Pan, Guoshun, Zhou, Yan, Xu, Li, Zou, Chunli, Gong, Hua
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Volume:
270
Language:
english
Journal:
Surface and Coatings Technology
DOI:
10.1016/j.surfcoat.2015.02.053
Date:
May, 2015
File:
PDF, 6.05 MB
english, 2015
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