PECVD synthesis, optical and mechanical properties of...

Applied Surface Science 2015 / 06 Vol. 339

PECVD synthesis, optical and mechanical properties of silicon carbon nitride films

Ermakova, Evgeniya, Rumyantsev, Yurii, Shugurov, Artur, Panin, Alexey, Kosinova, Marina
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Volume:
339
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.02.155
Date:
June, 2015
File:
PDF, 1.04 MB
english, 2015
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