Maskless laser processing of graphene

Microelectronic Engineering 2015 / 06 Vol. 141

Maskless laser processing of graphene

Wakaya, Fujio, Kurihara, Tadashi, Yurugi, Nariaki, Abo, Satoshi, Abe, Masayuki, Takai, Mikio
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Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.049
Date:
June, 2015
File:
PDF, 815 KB
english, 2015
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