Fluorescence Correlation Spectroscopic Investigation of Surface Adsorption of CMP Slurry Additives on Abrasive Particles
Wayman, Ashley E., Turner, Daniel K., Rawat, Ashwani, Carver, Colin T., Moinpour, Mansour, Remsen, Edward E.Volume:
1560
Year:
2013
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2013.1077
File:
PDF, 593 KB
english, 2013