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Effects of Self-Ion Implantation on the Thermal Growth of He-Induced Cavities in Silicon
Liu, C.L., Alquier, Daniel, Cayrel, Frédéric, Ntsoenzok, E., Ruault, M.O.Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.337
File:
PDF, 4.14 MB
english, 2004