Galvanostatic bottom-up filling of TSV-like trenches:...

Electrochimica Acta 2015 / 05 Vol. 163

Galvanostatic bottom-up filling of TSV-like trenches: Choline-based leveler containing two quaternary ammoniums

Kim, Myung Jun, Seo, Youngran, Kim, Hoe Chul, Lee, Yoonjae, Choe, Seunghoe, Kim, Young Gyu, Cho, Sung Ki, Kim, Jae Jeong
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Volume:
163
Language:
english
Journal:
Electrochimica Acta
DOI:
10.1016/j.electacta.2015.02.173
Date:
May, 2015
File:
PDF, 1.30 MB
english, 2015
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