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ECS Transactions [AAPM 25th Symposium on Microelectronics Technology and Devices - Sao Paulo, Brazil (September 6 - September 9, 2010)] - A Multi-Process Microfabrication Simulatorb on Cellular Automata
Colombo, Fábio B., Carreño, Marcelo N., Pavanello, M., Claeys, C., Martino, J.Year:
2010
Language:
english
DOI:
10.1149/1.3474147
File:
PDF, 702 KB
english, 2010