The Investigation of Silicon anf Boron Carbonitride Films...

Materials Science Forum 2000 Vol. 321-324

The Investigation of Silicon anf Boron Carbonitride Films Structure by Diffration of Sychrotron Radiation

Maximovski, E.A., Yurjev, Gennagiy S., Kosinova, M.L., Fainer, N.I., Rumyantsev, Yu.M.
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Volume:
321-324
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.321-324.230
File:
PDF, 362 KB
2000
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