Electrical characterization of top-gated molybdenum...

Microelectronic Engineering 2015 / 11 Vol. 147

Electrical characterization of top-gated molybdenum disulfide metal–oxide–semiconductor capacitors with high-k dielectrics

Zhao, P., Vyas, P.B., McDonnell, S., Bolshakov-Barrett, P., Azcatl, A., Hinkle, C.L., Hurley, P.K., Wallace, R.M., Young, C.D.
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Volume:
147
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.04.078
Date:
November, 2015
File:
PDF, 678 KB
english, 2015
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