Formation of Pb Inclusions in Si by Ion Implantation

Materials Science Forum 1998 Vol. 269-272

Formation of Pb Inclusions in Si by Ion Implantation

Touboltsev, V.S., Johnson, E., Dahmen, U., Johansen, A., Sarholt, Leif, Xiao, S.Q.
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Volume:
269-272
Year:
1998
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.269-272.345
File:
PDF, 582 KB
english, 1998
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