Porous Organosilicates for On-Chip Dielectric Applications

MRS Proceedings 1999 / 1 Vol. 565

Porous Organosilicates for On-Chip Dielectric Applications

Miller, R. D., Beyers, R., Carter, K. R., Cook, R. F., Harbison, M., Hawker, C. J., Hedrick, J. L., Lee, V., Liniger, E., Nguyen, C., Remenar, J., Sherwood, M., Trollsås, M., Volksen, W., Yoon, D. Y.
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Volume:
565
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-565-3
Date:
January, 1999
File:
PDF, 1.83 MB
english, 1999
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