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Interfacial and Electrokinetic Characterization of IPA Solutions Related to Semiconductor Wafer Drying and Cleaning
Park, Jin-Goo, Lee, Sang-Ho, Ryu, Ju-Suk, Hong, Yi-Koan, Kim, Tae-Gon, Busnaina, Ahmed A.Volume:
153
Year:
2006
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2214532
File:
PDF, 217 KB
english, 2006