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Direct patterning of sol–gel metal oxide semiconductor and dielectric films via selective surface wetting
Sung, Sujin, Park, Sungjun, Cha, Seungbok, Lee, Won-June, Kim, Chang-Hyun, Yoon, Myung-HanVolume:
5
Year:
2015
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C5RA04515K
File:
PDF, 721 KB
english, 2015