The Removal of Silica Particles from Micron Wide Trenches...

Solid State Phenomena 2008 Vol. 134

The Removal of Silica Particles from Micron Wide Trenches by Megasonic Cleaning

Wostyn, Kurt, Quenette, Vincent, Vereecke, Guy, Mertens, Paul W.
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Volume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.221
File:
PDF, 325 KB
english, 2008
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