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Preparation of Ge2Sb2Te5 thin film for Phase Change Random Access Memory by RF Magnetron Sputtering and DC Magnetron Sputtering
Kikuchi, Shin, Oh, Dong Yong, Kimura, Isao, Nishioka, Yutaka, Suu, KoukouVolume:
918
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0918-H07-10-G08-10
Date:
January, 2006
File:
PDF, 276 KB
english, 2006