Preparation of Ge2Sb2Te5 thin film for Phase Change Random...

Preparation of Ge2Sb2Te5 thin film for Phase Change Random Access Memory by RF Magnetron Sputtering and DC Magnetron Sputtering

Kikuchi, Shin, Oh, Dong Yong, Kimura, Isao, Nishioka, Yutaka, Suu, Koukou
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
918
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0918-H07-10-G08-10
Date:
January, 2006
File:
PDF, 276 KB
english, 2006
Conversion to is in progress
Conversion to is failed