![](/img/cover-not-exists.png)
Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane
Makarov, Yuri N., Talalaev, R.A., Vorob'ev, A.N., Ramm, Mark S., Bogdanov, Maxim V.Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.51
File:
PDF, 338 KB
english, 2009