[ECS 24th Symposium on Microelectronics Technology and Devices - Natal, Brazil (August 31 - September 3, 2009)] ECS Transactions - A new fabrication technique of planar metallic microstructures on alumina substrate
Da Costa, Juvenil S., Flacker, Alexander, Fruett, FabianoYear:
2009
Language:
english
DOI:
10.1149/1.3183736
File:
PDF, 283 KB
english, 2009