Nano-Imprint Lithography of 100nm Sized Patterns Using...

Solid State Phenomena 2007 Vol. 121-123

Nano-Imprint Lithography of 100nm Sized Patterns Using Water Soluble PVA, Poly(Vinyl Alcohol), Template

Lee, Heon, Yang, Ki Yeon, Hong, Sung Hoon, Schaper, C.D., Jung, Gun Young
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Volume:
121-123
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.121-123.661
File:
PDF, 435 KB
english, 2007
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