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Machining Mechanisms of Si Wafers in Mechanochemical Polishing by Soft Abrasives
Yasunaga, NobuoVolume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.385
File:
PDF, 422 KB
english, 2005