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The Influence of Low-Energy Argon Implantation and Out-Diffusion Heat Treatments on Hydrogen Enhanced Thermal Donor Formation in P-Type Czochralski Silicon
Ulyashin, Alexander G., Petlitskii, A.N., Job, Reinhart, Fahrner, Wolfgang R., Fedotov, A.K., Stognii, A.I.Volume:
69-70
Year:
1999
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.69-70.409
File:
PDF, 386 KB
1999