Prospects for New Wafer Types and Materials in...

Solid State Phenomena 2004 Vol. 95-96

Prospects for New Wafer Types and Materials in Semiconductor Technology and Factors for their Successful Introduction

Bergholz, Werner, Wittmann, Jürgen, Winkler, Rainer, Tews, Helmut, Fehlhaber, Roger
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Volume:
95-96
Year:
2004
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.665
File:
PDF, 843 KB
english, 2004
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