Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex

Materials Science Forum 1994 Vol. 143-147

Rapid Thermal Annealing of Ion Implanted Strained Si1-xGex

Thomsen, E.V., Nylandsted-Larsen, Arne, Hansen, J.L., Kringhøj, P., Shiryaev, S.Y., Weyer, G.
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Volume:
143-147
Year:
1994
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.143-147.513
File:
PDF, 355 KB
1994
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