In2O3 Thin Films Prepared on TiAlN Substrates Using a Triethylindium and Oxygen Mixture
Kim, Hyoun Woo, Hwang, Sun Keun, Cho, Won Seung, Ko, Tae Gyung, Choi, Seung Yong, Lee, Wan In, Park, Sang Eon, Joo, Jung Hoon, Kim, Dong Ik, Kim, Seong Gyoon, Choe, Byung Hak, Min, Seok Hong, Choi, JaVolume:
124-126
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.124-126.1597
File:
PDF, 417 KB
english, 2007