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Dependence of Wet Oxidation on the Defect Density in 3C-SiC
Eickhoff, M., Vouroutzis, N., Nielsen, A., Krötz, G., Stoemenos, J.Volume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.663
File:
PDF, 405 KB
2001