Thermodynamic investigation of the gas-phase reactions in the chemical vapor deposition of boron carbide with BCl3–CH4–H2 precursors
Yan Zeng, Kehe Su, Juanli Deng, Tao Wang, Qingfeng Zeng, Laifei Cheng, Litong ZhangVolume:
861
Year:
2008
Language:
english
Pages:
14
DOI:
10.1016/j.theochem.2008.04.016
File:
PDF, 1.17 MB
english, 2008