Electrical Characterization of Inductively Coupled Plasma...

Advanced Materials Research 2011 / 4 Vol. 227

Electrical Characterization of Inductively Coupled Plasma Reactor Excited by RF (13.56MHz)

Alim, Mohamed Mounis, Zekara, Mourad, Henni, Laid, Tadjine, Rabah, Henda, Karim
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
227
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.227.185
Date:
April, 2011
File:
PDF, 249 KB
english, 2011
Conversion to is in progress
Conversion to is failed