Fabrication of Buckling Free Ultrathin Silicon Membranes by Direct Bonding with Thermal Difference
Delachat, Florian, Constancias, Christophe, Fournel, Frank, Morales, Christophe, Le Drogoff, Boris, Chaker, Mohamed, Margot, JoelleVolume:
9
Language:
english
Journal:
ACS Nano
DOI:
10.1021/acsnano.5b00234
Date:
April, 2015
File:
PDF, 4.93 MB
english, 2015