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[IEEE 2014 IEEE Sensors - Valencia, Spain (2014.11.2-2014.11.5)] IEEE SENSORS 2014 Proceedings - A CMOS interdigital capacitive humidity sensor enhanced by a multi-layered structure
Huang, Jian-Qiu, Chen, Wen-Hao, Zhu, Dong-Ping, Han, LeiYear:
2014
Language:
english
DOI:
10.1109/icsens.2014.6985289
File:
PDF, 1.02 MB
english, 2014