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Leakage Current Control in Recessed SiGe Source/Drain Junctions
Claeys, C., Gonzalez, M. Bargallo, Eneman, G., Verheyen, P., Bender, H., Schreutelkamp, R., Washington, L., Nouri, F., Simoen, E.Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2756370
File:
PDF, 1.02 MB
english, 2007