Isotropic Channel Mobility in UMOSFETs on 4H-SiC C-Face...

Materials Science Forum 2010 / 4 Vol. 645-648

Isotropic Channel Mobility in UMOSFETs on 4H-SiC C-Face with Vicinal Off-Angle

Harada, Shinsuke, Ito, Sachiko, Kato, Makoto, Takatsuka, Akio, Kojima, Kazutoshi, Fukuda, Kenji, Okumura, Hajime
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.999
Date:
April, 2010
File:
PDF, 993 KB
english, 2010
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