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Dopant Condensation beyond Solubility Limit in the Vicinity of Silicon/Silicide Interface Based on First-Principles Calculations
Yamauchi, Takashi, Nishi, Yoshifumi, Kinoshita, Atsuhiro, Tsuchiya, Yoshinori, Koga, Junji, Kato, KoichiVolume:
1070
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1070-E06-10
Date:
January, 2008
File:
PDF, 1.26 MB
english, 2008