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Rapid Thermal Annealing of Amorphous Silicon Thin Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition
Lin, Pei-Yi, Wu, Ping-Jung, Chen, I-ChenVolume:
1245
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1245-A05-05
Date:
January, 2010
File:
PDF, 651 KB
english, 2010