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Moisture barrier evaluation of SiOx/SiNx stacks on polyimide substrates using electrical calcium test
Zhang, Shiyu, Xue, Wei, Yu, ZhinongVolume:
580
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.02.023
Date:
April, 2015
File:
PDF, 1019 KB
english, 2015