Substrate Effect on the Diamond-Like Carbon Films...

Materials Science Forum 2007 Vol. 539-543

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

Tzeng, S.S., Wu, Wei Min, Hsu, J.S.
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Volume:
539-543
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.539-543.3574
File:
PDF, 671 KB
english, 2007
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