Imperfections in Silicon Induced by Diffusion of the...

Japanese Journal of Applied Physics 1964 / 11 Vol. 3; Iss. 11

Imperfections in Silicon Induced by Diffusion of the Impurities

Ino, Hiroyuki, Kawamura, Toyosaku, Yasufuku, Matami
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Volume:
3
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.3.692
Date:
November, 1964
File:
PDF, 2.84 MB
1964
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