Cross Section Measurements for Electron-Impact Dissociation of C H F 3 into Neutral and Ionic Radicals
Goto, Masashi, Nakamura, Keiji, Toyoda, Hirotaka, Sugai, HideoVolume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.3602
Date:
June, 1994
File:
PDF, 1013 KB
1994