Implementing an In Situ Surface Preparation Prior to Ni...

Solid State Phenomena 2008 Vol. 134

Implementing an In Situ Surface Preparation Prior to Ni Deposition for Ni Salicide Processes

Chang, Kyuh Wan, Bolton, Scott, Rossow, Marc, Gregory, Rich, Jiang, Jack, Jawarani, Dharmesh, Zollner, Stefan, Denning, Dean, Cheek, Jon
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Volume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.19
File:
PDF, 377 KB
english, 2008
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