Transmission Electron Microscopy Investigation of Defects...

Materials Science Forum 1998 Vol. 264-268

Transmission Electron Microscopy Investigation of Defects in B-Implanted 6H-SiC

Persson, P.O.Å., Wahab, Qamar-ul, Hultman, L., Nordell, Nils, Schöner, Adolf, Rottner, K., Olsson, E., Linnarsson, Margareta K.
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Volume:
264-268
Year:
1998
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.413
File:
PDF, 551 KB
english, 1998
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