[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Electron beam switched trapping and release of nanoparticles on nanopore array
Hoshino, Takayuki, Mabuchi, KunihikoYear:
2015
Language:
english
DOI:
10.1109/memsys.2015.7051004
File:
PDF, 1009 KB
english, 2015