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Whole-Wafer Mapping of Dislocations in 4H-SiC Epitaxy
Stahlbush, Robert E., Liu, Kendrick X., Zhang, Q., Sumakeris, Joseph J.Volume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.295
File:
PDF, 3.86 MB
english, 2007