Dual Ion Beam Deposition and Characterizatio of TiOx Thin...

Dual Ion Beam Deposition and Characterizatio of TiOx Thin Films

Rizzo, A., Cucurachi, S., Mirenghi, L., Scaglione, Silvia, Vasanelli, L., Melissano, E.
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Volume:
203
Year:
1996
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.203.161
File:
PDF, 349 KB
1996
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