Low-Temperature Plasma-Processed Microcrystalline Silicon...

Low-Temperature Plasma-Processed Microcrystalline Silicon Thin Films for Large-Area Electronics

Roca i Cabarrocas, Pere, Kumar, Surendra, Tripathi, V., Bulkin, P., Brenot, R., Drévillon, B., Vanderhaghen, R., French, I.
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Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.361
File:
PDF, 438 KB
2001
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