Low-Temperature Plasma-Processed Microcrystalline Silicon Thin Films for Large-Area Electronics
Roca i Cabarrocas, Pere, Kumar, Surendra, Tripathi, V., Bulkin, P., Brenot, R., Drévillon, B., Vanderhaghen, R., French, I.Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.361
File:
PDF, 438 KB
2001