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[ECS 209th ECS Meeting - Denver, Colorado (May 7-May 12, 2006)] ECS Transactions - Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
Inoue, Naohisa, Karen, Akiya, Yagi, Hirochika, Masumoto, K., Shinomiya, M., Kashima, Kazuhiko, Eifuku, K., Koizumi, M., Takahashi, T., Takenawa, T., Shingu, K.Volume:
2
Year:
2006
Language:
english
DOI:
10.1149/1.2195680
File:
PDF, 172 KB
english, 2006