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ECS Transactions [ECS 217th ECS Meeting - Vancouver, Canada (April 25 - April 30, 2010)] - Electrical Characterization of ALD Al
Tantraviwat, Doldet, Low, YeeHooi, Baine, Paul, Mitchell, Neil S., McNeill, David W., Armstrong, Brian M., Gamble, HaroldYear:
2010
Language:
english
DOI:
10.1149/1.3375602
File:
PDF, 323 KB
english, 2010