Epitaxial Growth and Processing of InP Films in a 'Novel'...

Epitaxial Growth and Processing of InP Films in a 'Novel' Remote Plasma-MOCVD Apparatus

Bruno, G., Losurdo, Maria, Capezzuto, P., Capozzi, V., Lorusso, F.G., Minafra, A.
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Volume:
203
Year:
1996
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.203.85
File:
PDF, 418 KB
1996
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