Stress Control in 3C-SiC Films Grown on Si(111)
Zgheib, Charbel, Masri, Pierre M., Weih, Petia, Ambacher, Oliver, Pezoldt, JörgVolume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.301
File:
PDF, 199 KB
english, 2004