Investigation of Crystal Defects in Epitaxial Layers on...

Investigation of Crystal Defects in Epitaxial Layers on Nitrogen-Doped Substrates and a Method for their Suppression

Nakai, Katsuhiko, Kitahara, Koichi, Ohta, Yasumitsu, Ikari, Atsushi, Tanaka, Masahiro
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Volume:
95-96
Year:
2004
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.95-96.11
File:
PDF, 624 KB
2004
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