Aluminum P-Type Doping of Bulk SiC Single Crystals by Tri-Methyl-Aluminum
Hens, Philip, Künecke, Ulrike, Wellmann, Peter J.Volume:
600-603
Year:
2009
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.600-603.19
File:
PDF, 508 KB
english, 2009