External Gettering around Extended Defects in Multicrystalline Silicon Wafers
Martinuzzi, Santo, Perichad, I., Stemmer, M.Volume:
37-38
Year:
1994
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.37-38.361
File:
PDF, 390 KB
1994