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Film Morphology and Process Conditions in Epitaxial Silicon Carbide Growth via Chlorides Route
Masi, Maurizio, Veneroni, Alessandro, Fiorucci, A., La Via, Francesco, Foti, Gaetano, Mauceri, Marco, Leone, Stefano, Pistone, Giuseppe, Condorelli, G., Abbondanza, Giuseppe, Valente, Gian Luca, CrippVolume:
556-557
Year:
2007
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.556-557.93
File:
PDF, 428 KB
english, 2007